Number of the records: 1  

Introduction to microlithography

  1. TitleIntroduction to microlithography : theory, materials, and processing
    Another authors Thompson L.F. (Editor)
    Willson C.G. (Editor)
    Bowden M.J. (Editor)
    Issue dataWashington : American Chemical Society , 1983. - 363 s.
    EditionACS Symposium Series
    Languageeng - English
    CountryUS - United States of America
    Catal.org.SAVELEK
    Copy count1, currently available 0, at library only 1
    Document kindzborníky
    book

    book

    Call numberLocationSublocationInfo
    8811Elektrotechnický ústav SAVeli/309In-Library Use Only

Number of the records: 1  

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