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Experimental and theoretical study on chemically semi-amplified resist AR-P 6200

  1. TitleExperimental and theoretical study on chemically semi-amplified resist AR-P 6200
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV    SCOPUS    RID    ORCID
    Co-authors Vutova Katia

    Andok Robert 1973- SAVINFO - Ústav informatiky SAV    SCOPUS    RID    ORCID

    Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV    SCOPUS    RID

    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV    SCOPUS    RID

    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV    SCOPUS    RID

    Tanaka Takeshi

    Source document Journal of Physics: Conference Series. Vol. 992 (2018), art. no. 012057
    Languageeng - English
    URLURL link
    Document kindrozpis článkov z periodík (rbx)
    CitationsXU, Jian - WANG, Ang - DAN, Yaping. Plasmonic micropipe spectral filters in mid-infrared. In OPTICS LETTERS. ISSN 0146-9592, 2019, vol. 44, no. 18, pp. 4479-4482.
    MPATZAKA, T. - PAPAGEORGIOU, G. - PAPANIKOLAOU, N. - VALAMONTES, E. - GANETSOS, Th - GOUSTOURIDIS, D. - RAPTIS, I. - ZISIS, G. In-situ characterization of the development step of high-resolution e-beam resists. In Micro and Nano Engineering, 2020-11-01, 9, pp.
    HRICKO, J. - HAVLIK, S. Analysis of Impacts of the Design Parameters on the Working Frequency of the Compliant Devices. In ADVANCES IN SERVICE AND INDUSTRIAL ROBOTICS, RAAD 2022. ISSN 2211-0984, 2022, vol. 120, p. 281-289. Dostupné na: https://doi.org/10.1007/978-3-031-04870-8_33.
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2018
    Registered inWOS
    Registered inSCOPUS
    DOI 10.1088/1742-6596/992/1/012057
    article

    article

    File nameAccessSizeDownloadedTypeLicense
    Experimental and theoretical study on chemically semi-amplified resist AR-P 6200.pdfavailable1.2 MB0Publisher's version
    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    N
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    201820170.241Q3
Number of the records: 1  

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