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Cross-ionization of the sputtered flux during hybrid high power impulse/direct-current magnetron co-sputtering
Title Cross-ionization of the sputtered flux during hybrid high power impulse/direct-current magnetron co-sputtering Author Šroba Viktor Mikula Marian SAVMAMES - Ústav materiálov a mechaniky strojov SAV SCOPUS RID Co-authors Viskupová Katarína Wicher Bartosz Rogoz Vladyslav Li Xiao Greczynski Grzegorz Source document Journal of Vacuum Science and Technology A. Vol. 42, iss. 2 (2024), art. no. 023410 Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rbx) Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2024 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1116/6.0003258 article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2024 2023 2.4 Q3 0.569 Q2
Number of the records: 1