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Micro structuring of diaphragms for III-N MEMS using short pulsed laser ablation
Title Micro structuring of diaphragms for III-N MEMS using short pulsed laser ablation Author Zehetner J. Co-authors Kasemann S. Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Nürnberger S. Source document ADEPT 2017 : proceedings of the 5th International Conference on Advances in Electronic and Photonic Technologies, Podbanské, High Tatras, Slovakia, June 19-22, 2017. P. 287-290. - Žilina : University of Žilina, 2017 / Lettrichová I. ; Šušlik Ľ. ; Kováč Jaroslav Jr. Language eng - English Document kind rozpis článkov z periodík (rzb) Category AFD - Published papers from domestic scientific conferences Year 2017 
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rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2017
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