Diamond cantilevers for MEMS sensor applications fabricated by laser abiation and optimized etching techniques

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Title	Diamond cantilevers for MEMS sensor applications fabricated by laser abiation and optimized etching techniques
Author	Zehetner J.
Co-authors	Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ^ORCID
	Izsák Tibor SAVELEK - Elektrotechnický ústav SAV ^ORCID
	Kováčová Eva 1966 SAVELEK - Elektrotechnický ústav SAV
	Držík Milan
	Dohnal F.
	Kromka A.

Source document	ASDAM 2022 : Conference Proceedings. P. 195-198. - : IEEE, 2022 / Marek Juraj ; Donoval D. ; Vavrinský E. ; International Conference on Advanced Semiconductor Devices and Microsystems
Language	eng - English
Country	US - United States of America
Document kind	rozpis článkov z periodík (rzb)
Category	AFD - Published papers from domestic scientific conferences
Category of document (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document	príspevok z podujatia
Year	2022

article

	File name	Access	Size	Downloaded	Type	License
	Diamond cantilevers for MEMS sensor applications fabricated by laser.pdf	Neprístupný/archív	1.5 MB	0	Publisher's version

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2022

Number of the records: 1