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Piezoelectric thin film pressure sensor made by atomic layer deposition of 002-oriented ZnO on

  1. TitlePiezoelectric thin film pressure sensor made by atomic layer deposition of 002-oriented ZnO on
    Author Hudec Boris SAVELEK - Elektrotechnický ústav SAV    ORCID
    Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Precner Marián 1987 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Seifertová Alena 1958 SAVELEK - Elektrotechnický ústav SAV

    Fedor Ján 1976 SAVELEK - Elektrotechnický ústav SAV

    Tóbik Jaroslav 1973 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Source document ASDAM 2022 : Conference Proceedings. P. 199-202. - : IEEE, 2022 / Marek Juraj ; Donoval D. ; Vavrinský E. ; International Conference on Advanced Semiconductor Devices and Microsystems
    Languageeng - English
    CountryUS - United States of America
    Document kindrozpis článkov z periodík (rzb)
    CitationsSreeraman, R., Thrinam Vishwakumaar, M.E., Muralidharan, J., Devibalan, K.: Automatic Accident Detection System In Intelligent Computing and Control for Engineering and Business Systems, ICCEBS 2023
    CategoryAFD - Published papers from domestic scientific conferences
    Category of document (from 2022)V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
    Type of documentpríspevok z podujatia
    Year2022
    article

    article

    File nameAccessSizeDownloadedTypeLicense
    Piezoelectric thin film pressure sensor made by atomic layer deposition.pdfNeprístupný/archív949.4 KB1Publisher's version
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2022
Number of the records: 1  

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