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Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate
Title Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate Author Sobierajski Ryszard Co-authors Jacyna Iwanna Dlužewski Piotr Klepka Marcin T. Klinger Dorota Pelka Jerzy B. Burian Tomáš Hájková V. Juha Libor Saksl Karel 1974 SAVMATVY - Ústav materiálového výskumu SAV SCOPUS ORCID Vozda Vojtěch Makhotkin Igor Louis Eric Faatz Bart Tiedtke Kai Toleikis Sven Enkisch Hartmut Hermann M. Strobel Sebastian Loch Rolf A. Chalupský Jaromír Source document Optics Express. Vol. 24, no. 14 (2016), p. 15468-15477 Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rbx) Citations KRZYWINSKI, Jacek - CONLEY, Raymond - MOELLER, Stefan - GWALT, Grzegorz - SIEWERT, Frank - WABERSKI, Christoph - ZESCHKE, Thomas - COCCO, Daniele. Damage thresholds for blaze diffraction gratings and grazing incidence optics at an X-ray free-electron laser. In JOURNAL OF SYNCHROTRON RADIATION. ISSN 1600-5775, 2018, vol. 25, no., pp. 85-90. ROSSBACH, Joerg - SCHNEIDER, Jochen R. - WURTH, Wilfried. 10 years of pioneering X-ray science at the Free-Electron Laser FLASH at DESY. In PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS. ISSN 0370-1573, 2019, vol. 808, no., pp. 1-74. SAKAUE, Kazuyuki - MOTOYAMA, Hiroto - HAYASHI, Ryosuke - IWASAKI, Atsushi - MIMURA, Hidekazu - YAMANOUCHI, Kaoru - SHIBUYA, Tatsunori - ISHINO, Masahiko - DINH, Thanh-Hung - OGAWA, Hiroshi - HIGASHIGUCHI, Takeshi - NISHIKINO, Masaharu - KURODA, Ryunosuke. Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses. In OPTICS LETTERS. ISSN 0146-9592, 2020, vol. 45, no. 10, pp. 2926-2929. CHEN, Tong - WANG, Wenjun - TAO, Tao - ZHANG, Yilin - MEI, Xuesong. Weakening heat accumulation behavior caused by femtosecond pulses for high-performance antireflection micro-nano porous structures. In INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER. ISSN 0017-9310, 2021, vol. 164, no., pp. KONONENKO, Taras - SOVYK, Dmitry N. - KONONENKO, Vitaly V. - KONOV, Vitaly. Optimization strategy for high-quality laser milling of silicon. In OPTICS AND LASER TECHNOLOGY, 2022, vol. 150, no., pp. ISSN 0030-3992. Dostupné na: https://doi.org/10.1016/j.optlastec.2022.107921. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2016 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1364/OE.24.015468 
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File name Access Size Downloaded Type License Role of heat accumulation in the multi-shot damage.pdf available 3 MB 2 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2016 2015 3.148 Q1 1.910 Q1
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