Effects of HSQ e-beam resist processing on the fabrication of ICP-RIE etched TiO2 nanostructures

Number of the records: 1

Title	Effects of HSQ e-beam resist processing on the fabrication of ICP-RIE etched TiO2 nanostructures
Author	Hotový I.
Co-authors	Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Predanocy Martin 1984- ^SCOPUS ^RID
	Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Řeháček V.

Source document	Journal of Electrical Engineering. Vol. 67, no. 6 (2016), p. 454-458
Language	eng - English
Country	SK - Slovak Republic
Document kind	rozpis článkov z periodík (rbx)
Citations	PAL, Debabrata. Synthesis of metal oxide nanoparticles A general overview. In INDIAN JOURNAL OF CHEMISTRY SECTION A-INORGANIC BIO-INORGANIC PHYSICAL THEORETICAL & ANALYTICAL CHEMISTRY. ISSN 0376-4710, 2020, vol. 59, no. 10, pp. 1513-1528.
Category	ADNA - Scientific papers in domestic impacted journals registered in Web of Sciences or Scopus
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2017
Registered in	WOS
Registered in	SCOPUS
DOI	10.1515/jee-2016-0067

article

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	N

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2016	2015	0.407	Q4	0.226	Q3

Number of the records: 1