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Introduction to microlithography
Title Introduction to microlithography : theory, materials, and processing Another authors Thompson L.F. (Editor) Willson C.G. (Editor) Bowden M.J. (Editor) Issue data Washington : American Chemical Society , 1983. - 363 s. Edition ACS Symposium Series Language eng - English Country US - United States of America Catal.org. SAVELEK Copy count 1, currently available 0, at library only 1 Document kind zborníky book
Call number Location Sublocation Info 8811 Elektrotechnický ústav SAV eli/309 In-Library Use Only
Number of the records: 1