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Effect of polyimide fixation on thermal performance of GaAs cantilever based MEMS
Title Effect of polyimide fixation on thermal performance of GaAs cantilever based MEMS : 3D numerical analysis with DEETEN Author Burian Eduard SAVELEK - Elektrotechnický ústav SAV Co-authors Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document ASDAM 2002 : 4th International Conference on Advanced Semiconductor Devices and Applications. P. 13 / Breza J. ; Donoval D.. - Piscataway : IEEE, 2002 Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rzb) Category AEC - Scientific papers in foreign peer-reviewed proceedings, monographs Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok Year 2002 
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rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2002
Number of the records: 1