Number of the records: 1
Scatterometer basing on a STAR GEM idea for optical measurements of microlenses
Title Scatterometer basing on a STAR GEM idea for optical measurements of microlenses Author Kawate E. Co-authors Hain Miroslav 1960 SAVMER - Ústav merania SAV SCOPUS RID ORCID Source document Reflection, Scattering, and Diffraction from Surfaces III : Volume 8495. P. 84950M. - : SPIE, 2012 / Hanssen L.M. Language eng - English Document kind rozpis článkov z periodík (rzb) Category AEC - Scientific papers in foreign peer-reviewed proceedings, monographs Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok Year 2012 Registered in WOS Registered in SCOPUS DOI 10.1117/12.932244 article
rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2012
Number of the records: 1