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Electrical properties of thin piezoelectric AlN layers prepared by DC and RF sputtering
Title Electrical properties of thin piezoelectric AlN layers prepared by DC and RF sputtering Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Dérer Ján 1948 SAVELEK - Elektrotechnický ústav SAV Hsu R.Ch. Kromka A. Izsák Tibor SAVELEK - Elektrotechnický ústav SAV ORCID Varga Marian SAVELEK - Elektrotechnický ústav SAV ORCID Tsai Hung-Yin Source document Proceedings of ADEPT 2023 : 11th International Conference on Advances in Electronic and Photonic Technologies, held in Podbanské, High Tatras, Slovakia, June 12th – 15th, 2023. P. 242-245. - Žilina : University of Zilina in EDIS-Publishing Centre of UZ, 2023 / Jandura D. ; Lettrichová I. ; Kováč J., jr. Language eng - English Country SK - Slovak Republic Document kind rozpis článkov z periodík (rzb) Category AFD - Published papers from domestic scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2023 
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