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Hydrogenated amorphous carbon films prepared by plasma-enhanced chemical vapor deposition
Title Hydrogenated amorphous carbon films prepared by plasma-enhanced chemical vapor deposition Author Huran Jozef 1955 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Kobzev A.P. Balalykin Nikolay I. Petzold J. Source document ASDAM 2008. P. 127-130 : conference proceedings. - Piscataway, NJ : Institute of Electrical and Electronics Engineers, 2008 / Haščík Štefan 1956 ; Osvald Jozef 1953 ; International Conference on Advanced Semiconductor Devices and Microsystems Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rzb) Category AEC - Scientific papers in foreign peer-reviewed proceedings, monographs Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok Year 2008 
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rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2008
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