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GaN, GaAs and silicon based micromechanical free standing hot plates for gas sensing
Title GaN, GaAs and silicon based micromechanical free standing hot plates for gas sensing Author Jakovenko J. Co-authors Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Držík Milan SAVSTAV - Ústav stavebníctva a architektúry SAV Ivanova M. Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Husák M. Source document . Vol. 1, (2009), p. 804-807 Procedia Chemistry Language eng - English Document kind rozpis článkov z periodík (rbx) Citations VITTOZ, S. - RUFER, L. - REHDER, G. - HEINLE, U. - BENKART, P. In EUROSENSOR XXIV CONFERENCE. 2010, vol. 5, p. 91-94. VITTOZ, S. - RUFER, L. - REHDER, G. - HEINLE, U. - BENKART, P. In SENSORS AND ACTUATORS A-PHYSICAL. DEC 2011, vol. 172, no. 1, SI, p. 27-34. GRIESSLER, C. - BRUNET, E. - MAIER, T. - STEINHAUER, S. - KOCK, A. - JORDI, T. - SCHRANK, F. - SCHREMS, M. In MICROELECTRONIC ENGINEERING. AUG 2011, vol. 88, no. 8, p. 1779-1781. Vittoz, S., Rufer, L., Rehder, G., Srnanek, R., Kovac, J. In Proceedings of the 4th IEEE International Workshop on Advances in Sensors and Interfaces, IWASI 2011 , art. no. 6004678 , pp. 17-20 Brunet, E., Mutinati, G.C., Steinhauer, S., Köck, A.: In Oxide Ultrathin Films. Weinheim: Wiley-VCH 2011 ISBN: 978-352733016-4 P. 239-263 HUANG, C.Y. - CHUNG, P.H. - SHYU, J.Z. - HO, Y.H. - WU, C.H. - LEE, M.C. - WU, M.J. Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods. In SUSTAINABILITY. OCT 2018, vol. 10, no. 10. GUO, X.Y. - GOSALVEZ, M.A. - XING, Y. - CHEN, Y. Etch and growth rates of GaN for surface orientations in the 0001 crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton. In MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. ISSN 1369-8001, JAN 2023, vol. 153. Dostupné na: https://doi.org/10.1016/j.mssp.2022.107173. Category ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2009 article
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