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MEMS pressure sensor with a high electron mobility transistor and a production method thereof
Title MEMS pressure sensor with a high electron mobility transistor and a production method thereof : prihláška patentu PCT/IB2014/063665 Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Vallo Martin SAVELEK - Elektrotechnický ústav SAV Issue data Banská Bystrica : ÚPV SR , 2014 Language eng - English Country SK - Slovak Republic Document kind monografie Category AGJ - Patent applications, utility model applications, design applications, trademark applications, applications for granting supplementary protection certificate, applications for registration of topographies of semiconductor products, designations of origin applications, geographical indications of goods and products applications, breeder's certificate applications Year 2014 
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Number of the records: 1