Concept of a platinum hotplate on thermoisolated polyimide membrane

Number of the records: 1

Title	Concept of a platinum hotplate on thermoisolated polyimide membrane
Author	Predanocy Martin 1984- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
Co-authors	Hotový I. SAVINFO - Ústav informatiky SAV
	Andok Robert 1973- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Řeháček V.

Source document	ASDAM 2020 : 13th International Conference on Advanced Semiconductor Devices and Microsystems. P. 79-82. - : IEEE, 2020 / Izsák Tibor ; Vanko Gabriel 1981
Language	eng - English
Country	US - United States of America
Document kind	rozpis článkov z periodík (rzb)
Citations	KOYUNCUOGLU, Aziz - AKCAKAYA, Dilek Isik - SUKAS, Ozlem Sardan - KUELAH, Haluk. Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask. In MICRO AND NANO ENGINEERING, 2022, vol. 16, no., pp. Dostupné na: https://doi.org/10.1016/j.mne.2022.100153.
Category	ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2021
Registered in	WOS
Registered in	SCOPUS
DOI	10.1109/ASDAM50306.2020.9393857

article

	File name	Access	Size	Downloaded	Type	License
	Concept of a platinum hotplate on thermoisolated polyimide membrane.pdf	Neprístupný/archív	617.8 KB	0	Publisher's version

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	N

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2020

Number of the records: 1