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Coplanar waveguides supported by InGaP and GaAs/AlGaAs membrane-like bridges
Title Coplanar waveguides supported by InGaP and GaAs/AlGaAs membrane-like bridges Author Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Co-authors Držík Milan SAVSTAV - Ústav stavebníctva a architektúry SAV Tomáška M. Krnáč Martin SAVELEK - Elektrotechnický ústav SAV Haščík Štefan 1956 SAVELEK - Elektrotechnický ústav SAV Mozolová Želmíra SAVELEK - Elektrotechnický ústav SAV Klasovitý M. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Source document Journal of Micromechanics and Microengineering. Vol. 12 (2002), p. 465-469 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations MOAGAR-POLADIAN, G - ULIERU, D - SANDU, C - BULINSKI, M - DINESCU, A - DANILA, M - GAVRILA, R. Microengraving of a potassium dihydrogen phosphate crystal by laser ablation technique. In MEMS, MOEMS, AND MICROMACHINING. ISSN 0277-786X, 2004, vol. 5455, no., pp. 375-380. PANTAZIS, A - NECULOIU, D - HATZOPOULOS, Z - VASILACHE, D - LAGADAS, M - DRAGOMAN, M - BUICULESCU, C - PETRINI, I - MULLER, AA - KONSTANTINIDIS, G - MULLER, A. Millimeter-wave passive circuit elements based on GaAs micromachining. In JOURNAL OF MICROMECHANICS AND MICROENGINEERING. ISSN 0960-1317, 2005, vol. 15, no. 7, pp. S53-S59. YANG, Gang - LIAO, Xiaoping - ZHANG, Zhiqiang. Young's modulus and residual stress of MEMS gold beams based on the GaAs MMIC process. In JOURNAL OF MICROMECHANICS AND MICROENGINEERING. ISSN 0960-1317, 2013, vol. 23, no. 4, pp. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2002 Registered in WOS 
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