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Laser ablation: A supporting technique to micromachining of SiC
Title Laser ablation: A supporting technique to micromachining of SiC Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Zehetner J. Choleva P. Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Source document ASDAM 2012 : conference proceedings. P. 259-262. - Piscataway : IEEE, 2012 / Haščík Štefan 1956 ; Osvald Jozef 1953 ; International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2012 Language eng - English Document kind rozpis článkov z periodík (rzb) Citations ZHANG, Huanzhen - HUANG, Ting - XIAO, Rongshi. Nanosecond pulsed fiber laser ablation of SiCinfp/inf/Al composite materials. In Zhongguo Jiguang/Chinese Journal of Lasers. ISSN 02587025, 2017-01-10, 44, 1, pp. MARTYCHOWIEC, A. - KWIETNIEWSKI, N. - SOCHACKI, M. A review of SiC surface cleaning methods. In PRZEGLAD ELEKTROTECHNICZNY. ISSN 0033-2097, 2019, vol. 95, no. 10, p. 154-157. WANG, Hongjian - YANG, Tao - LIAO, Runqian - SONG, Chang. Research Progress on Laser Drilling of Silicon Carbide and Its Power Devices. In Bandaoti Guangdian/Semiconductor Optoelectronics. ISSN 10015868, 2021-08-01, 42, 4, pp. Dostupné na: https://doi.org/10.16818/j.issn1001-5868.2021.04.002. Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2012 Registered in SCOPUS DOI 10.1109/ASDAM.2012.6418518 
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