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Amorphous silicon carbide films wit wide range of phosphorus concentration: Structural and electrical properties
Title Amorphous silicon carbide films wit wide range of phosphorus concentration: Structural and electrical properties Author Huran Jozef 1955 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Boháček Pavol 1954 SAVELEK - Elektrotechnický ústav SAV Sasinková Vlasta 1954- SAVCHEM - Chemický ústav SAV Kleinová Angela 1960- SAVPOLYM - Ústav polymérov SAV ORCID Kováčová Eva 1966 SAVELEK - Elektrotechnický ústav SAV Sekáčová Mária 1955 SAVELEK - Elektrotechnický ústav SAV Arbet Juraj 1959 SAVELEK - Elektrotechnický ústav SAV Co-authors Kobzev A.P. Source document Proceedings of ADEPT 6th International Conference on Advances in Electronic and Photonic Technologies, Tatranská Lomnica, High Tatras, Slovakia, June 18-21, 2018. P. 216-219. - Bratislava : Institute of Electronics and Photonics, FEI STU in Bratislava, 2018 / Nevrela J. ; Micjan M. ; Novota M. ; Kováč J. jr. Language eng - English Document kind rozpis článkov z periodík (rzb) Category AFD - Published papers from domestic scientific conferences Year 2018 
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rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2018
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