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Scanning proximal probes for parallel imaging and lithography
Title Scanning proximal probes for parallel imaging and lithography Author Ivanova K. Co-authors Sarov Y. Ivanov T.Z. Volland B. Rangelow I.W. Gotszalk T. Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Co-authors Frank A. Zöllner J. Bitterlich Ch. Wenzel U. Klett S. Zawierucha P. Zielony M. Dontzov D. Schott W. Zier M. Schmidt B. Engl W. Sulzbach T. Issue data American Vacuum Society Source document Journal of Vacuum Science Technology B. Vol. 26, No. 6 (2008) P. 2367-2373 Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rbx) Citations ZHANG, Tianlei - ZHAO, Gang - CHU, Jiaru - HUANG, Wenhao - BARTENWERFER, Malte - EICHHORN, Volkmar - FATIKOW, Sergej. Fabrication and Characterization of Piezoelectric Cantilever Array with Nano-assembly Carbon Nanotube Tips. In 2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO). ISSN 2373-5422, 2012, vol., no., pp. 292-296. SATTEL, Thomas - ROESER, Dennis - GUTSCHMIDT, Stefanie. MULTI-PHYSICS MODELING OF A ELECTRO-THERMALLY ACTUATED MICRO-CANTILEVER FOR SCANNING PROBE MICROSCOPY. In PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 8, PTS A AND B, 2012, vol., no., pp. 1057-1065. SOMNATH, Suhas - KIM, Hoe Joon - HU, Huan - KING, William P. Parallel nanoimaging and nanolithography using a heated microcantilever array. In NANOTECHNOLOGY. ISSN 0957-4484, 2014, vol. 25, no. 1, pp. SOMNATH, Suhas - LIU, Joseph O. - BAKIR, Mete - PRATER, Craig B. - KING, William P. Multifunctional atomic force microscope cantilevers with Lorentz force actuation and self-heating capability. In NANOTECHNOLOGY. ISSN 0957-4484, 2014, vol. 25, no. 39, pp. ZHANG, Tianlei - ZHAO, Gang - CHU, Jiaru - HUANG, Wenhao - BARTENWERFER, Malte - EICHHORN, Volkmar - FATIKOW, Sergej. Fabrication and characterisation of piezoelectric microcantilever array with carbon nanotube tips assembled by nano-handling. In International Journal of Nanomanufacturing. ISSN 17469392, 2014-01-01, 10, 3, pp. 265-280. BANERJEE, Steven - WANG, Wenhui - GUTSCHMIDT, Stefanie. DESIGN AND ANALYSIS OF ACTUATED MICRONEEDLES FOR ROBOTIC MANIPULATION. In PROCEEDINGS OF THE ASME 2014 INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2014), VOLUME 10: Micro- and Nano-Systems Engineering and Packaging, 2015, art. no. UNSP V010T13A061, 10 p. HU, Huan - KIM, Hoe Joon - SOMNATH, Suhas. Tip-Based Nanofabrication for Scalable Manufacturing. In MICROMACHINES. ISSN 2072-666X, 2017, vol. 8, no. 3, pp. BRUCHHAUS, L. - MAZAROV, P. - BISCHOFF, L. - GIERAK, J. - WIECK, A. D. - HOEVEL, H. Comparison of technologies for nano device prototyping with a special focus on ion beams: A review. In APPLIED PHYSICS REVIEWS. ISSN 1931-9401, 2017, vol. 4, no. 1, pp. PARK, Byoungyoul - AFSHARIPOUR, Elnaz - CHRUSCH, Dwayne - SHAFAI, Cyrus - ANDERSEN, David - BURLEY, Greg. Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation. In JOURNAL OF MICROMECHANICS AND MICROENGINEERING. ISSN 0960-1317, 2017, vol. 27, no. 8, pp. POTEKHINA, Alissa - WANG, Changhai. Review of Electrothermal Actuators and Applications. In ACTUATORS, 2019, vol. 8, no. 4, pp. ELIBOL, Kenan - HUMMEL, Stefan - BAYER, Bernhard C. - MEYER, Jannik C. New imaging modes for analyzing suspended ultra-thin membranes by double-tip scanning probe microscopy. In SCIENTIFIC REPORTS. ISSN 2045-2322, 2020, vol. 10, no. 1, pp. Dostupné na: https://doi.org/10.1038/s41598-020-60731-x. JOSHITHA, C. - SANTHOSH, C. - SREEJA, B.S. - ROOBAN, S. - RAO, G.S.N.K. Bistable Microdevice with Electrothermal Compliant Mechanism. In TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS. ISSN 1229-7607, JUN 2022, vol. 23, no. 3, p. 262-271. Dostupné na: https://doi.org/10.1007/s42341-021-00345-w. YANG, C. - DANG, C.Q. - ZHU, W.L. - JU, B.F. High-speed atomic force microscopy in ultra-precision surface machining and measurement: Challenges, solutions and opportunities. In Surface Science and Technology. 2023, vol. 1, no. 1, pp. 1- 22. doi: 0.1007/s44251-023-00006-5. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2008 Registered in WOS Registered in SCOPUS DOI 10.1116/1.2990789 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2008 2007 1.419 Q1 1.267 Q1
Number of the records: 1