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Microtechnological steps necessary for the fabrication of the insulating part of the micro-RF source used as a force sensor
Title Microtechnological steps necessary for the fabrication of the insulating part of the micro-RF source used as a force sensor Author Andok Robert 1973- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Source document MEMS Application in Industry 2016. P. 1-4. - Bratislava : STU v Bratislave, 2016 / Hricko Jaroslav 1980- ; Halgoš Ján ; MEMS Application in Industry 2016 Language eng - English Country SK - Slovak Republic Document kind rozpis článkov z periodík (rzb) Category AFD - Published papers from domestic scientific conferences Year 2017 article
rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2016
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