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TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques

  1. TitleTiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques
    Author Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV    SCOPUS    RID
    Co-authors Hotový I.

    Řeháček V.

    Andok Robert 1973- SAVINFO - Ústav informatiky SAV    SCOPUS    RID    ORCID

    Source document AIP Conference Proceedings : Applied Physics of Condensed Matter (APCOM 2021). Vol. 2411 (2021), art. no. 060003
    Languageeng - English
    Document kindrozpis článkov z periodík (rbx)
    CitationsEL MOHAJIR, Achraf - YAZDI, Mohammad Arab Pour - KRYSTIANIAK, Anna - HEINTZ, Olivier - MARTIN, Nicolas - BERGER, Franck - SANCHEZ, Jean-Baptiste. Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications. In CHEMOSENSORS, 2022, vol. 10, no. 10, pp. Dostupné na: https://doi.org/10.3390/chemosensors10100426.
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2021
    Registered inWOS
    Registered inSCOPUS
    DOI 10.1063/5.0067745
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    N
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    202120200.177
Number of the records: 1  

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