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TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques
Title TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques Author Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV SCOPUS RID Co-authors Hotový I. Řeháček V. Andok Robert 1973- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Source document AIP Conference Proceedings : Applied Physics of Condensed Matter (APCOM 2021). Vol. 2411 (2021), art. no. 060003 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations EL MOHAJIR, Achraf - YAZDI, Mohammad Arab Pour - KRYSTIANIAK, Anna - HEINTZ, Olivier - MARTIN, Nicolas - BERGER, Franck - SANCHEZ, Jean-Baptiste. Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications. In CHEMOSENSORS, 2022, vol. 10, no. 10, pp. Dostupné na: https://doi.org/10.3390/chemosensors10100426. Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2021 Registered in WOS Registered in SCOPUS DOI 10.1063/5.0067745 article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore N rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2021 2020 0.177
Number of the records: 1