Number of the records: 1
Microlithography
Title Microlithography : Science and Technology Another authors Sheats James R. (Editor) Smith Bruce W. Issue data New York : Marcel Dekker Inc. , 1998. - 780 s. Language eng - English Country US - United States of America UDC 621.3815 ISBN 0-8247-9953-4 Catal.org. SAVINFO Copy count 1, currently available 0, at library only 1 Document kind monografie 
book
Call number Location Sublocation Info S-26122 Ústav informatiky SAV In-Library Use Only
Number of the records: 1