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Investigation of deep interface traps in very-thin oxide /Si structures prepared at low temperatures using chemical solutions
Title Investigation of deep interface traps in very-thin oxide /Si structures prepared at low temperatures using chemical solutions Author Rusnák Jaroslav 1958 SAVFYZIK - Fyzikálny ústav SAV ORCID Pinčík Emil 1956 SAVFYZIK - Fyzikálny ústav SAV ORCID Co-authors Ružinský M. Imamura K. Matsumoto T. Štefečka M. Takahashi M. Kobayashi H. Source document Materials Science Forum. Vol. 609 (2009), p. 123. - Zürich : Trans. Tech. Publications Language eng - English Country CH - Switzerland Document kind rozpis článkov z periodík (rzb) Category AFC - Published papers from foreign scientific conferences Year 2009 Registered in WOS article
rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2009 2008 0.298 Q2
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