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Experimental and theoretical study on chemically semi-amplified resist AR-P 6200
Title Experimental and theoretical study on chemically semi-amplified resist AR-P 6200 Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Co-authors Vutova Katia Andok Robert 1973- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV SCOPUS RID Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV SCOPUS RID Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV SCOPUS RID Tanaka Takeshi Source document Journal of Physics: Conference Series. Vol. 992 (2018), art. no. 012057 Language eng - English URL URL link Document kind rozpis článkov z periodík (rbx) Citations XU, Jian - WANG, Ang - DAN, Yaping. Plasmonic micropipe spectral filters in mid-infrared. In OPTICS LETTERS. ISSN 0146-9592, 2019, vol. 44, no. 18, pp. 4479-4482. MPATZAKA, T. - PAPAGEORGIOU, G. - PAPANIKOLAOU, N. - VALAMONTES, E. - GANETSOS, Th - GOUSTOURIDIS, D. - RAPTIS, I. - ZISIS, G. In-situ characterization of the development step of high-resolution e-beam resists. In Micro and Nano Engineering, 2020-11-01, 9, pp. HRICKO, J. - HAVLIK, S. Analysis of Impacts of the Design Parameters on the Working Frequency of the Compliant Devices. In ADVANCES IN SERVICE AND INDUSTRIAL ROBOTICS, RAAD 2022. ISSN 2211-0984, 2022, vol. 120, p. 281-289. Dostupné na: https://doi.org/10.1007/978-3-031-04870-8_33. Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 Registered in WOS Registered in SCOPUS DOI 10.1088/1742-6596/992/1/012057 
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File name Access Size Downloaded Type License Experimental and theoretical study on chemically semi-amplified resist AR-P 6200.pdf available 1.2 MB 0 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore N rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2018 2017 0.241 Q3
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