Number of the records: 1
Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching
Title Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching Author Marton Marián Co-authors Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Michniak P. Behúl Miroslav Řeháček V. Redhammer R. Vincze A. Papula Martin Vojs M. Source document Vacuum. Vol. 170 (2019), art. no. 108954 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations CUI, Naiyuan - WANG, Fei - GUO, Lei. Catalytic etching of {100}-oriented diamond coating with Ni and Cu nanoparticles under hydrogen. In INTERNATIONAL JOURNAL OF MODERN PHYSICS B. ISSN 0217-9792, 2020, vol. 34, no. 8, pp. ZOLOTUKHIN, D. B. - OKS, E. M. - TYUNKOV, A. - YAKOVLEV, E. - YUSHKOV, Yu G. Effect of a dielectric cavity on the ion etching of dielectrics by electron beam-produced plasma generated by a forevacuum plasma electron source. In VACUUM. ISSN 0042-207X, 2021, vol. 192, no., pp. LIU, Fangmu - DENG, Zejun - MIAO, Dongtian - CHEN, Weipeng - WANG, Yijia - ZHOU, Kechao - MA, Li - WEI, Qiuping. A highly stable microporous boron-doped diamond electrode etched by oxygen plasma for enhanced electrochemical ozone generation. In JOURNAL OF ENVIRONMENTAL CHEMICAL ENGINEERING, 2021, vol. 9, no. 6, pp. ISSN 2213-2929. Dostupné na: https://doi.org/10.1016/j.jece.2021.106369. CHEN, Yu Chih - LI, Bing Chang - HSU, Pei Ling - LIN, Tsung Yi - CHEN, I. An - LIN, Chun Hung - HSU, Hsin Cheng - YEH, Chin Chih - LIAN, Nan Tzu - YANG, Ta Hone - CHEN, Kuang Chao. Plasma Etching Pre-treatment for a TEM Lamella Preparation of 3D NAND with High Aspect Ratio. In Conference Proceedings from the International Symposium for Testing and Failure Analysis, 2021-01-01, 2021-October, pp. 141-145. Dostupné na: https://doi.org/10.31399/asm.cp.istfa2021p0141. ZHENG, Yuting - LIU, Yanhui - WANG, Lin - LIU, Jinlong - WEI, Junjun - CHEN, Liangxian - AN, Kang - ZHANG, Xiaotong - YE, Haitao - ZHOU, Haojun - TAO, Hongliang - YIN, Yuhang - OUYANG, Xiaoping - LI, Chengming. Vertically Aligned Boron-Doped Diamond Hollow Nanoneedle Arrays for Enhanced Field Emission. In ACS APPLIED NANO MATERIALS, 2022, vol., no., pp. Dostupné na: https://doi.org/10.1021/acsanm.2c02180. ZHENG, Yuting - JIA, Yanwei - LIU, Jinlong - WEI, Junjun - CHEN, Liangxian - AN, Kang - YAN, Xiongbo - ZHANG, Xiaotong - YE, Haitao - OUYANG, Xiaoping - LI, Chengming. Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties. In VACUUM, 2022, vol. 199, no., pp. ISSN 0042-207X. Dostupné na: https://doi.org/10.1016/j.vacuum.2022.110932. SUMAN, S. - SHARMA, D.K. - SAIN, S. - SZABO, O. - SETHY, S.K. - RAKESH, B. - BALAJI, U. - MARTON, M. - VOJS, M. - ROY, S.S. - SAKTHIVEL, R. - SANKARAN, K.J. - KROMKA, A. Nanoscale Investigation on the Improvement of Electrical Properties of Boron-Doped Diamond Nanostructures for High-Performance Plasma Displays. In ACS APPLIED ELECTRONIC MATERIALS. SEP 12 2023, vol. 5, no. 9, p. 4946-4958. Dostupné na: https://doi.org/10.1021/acsaelm.3c00713. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2020 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1016/j.vacuum.2019.108954 
article
File name Access Size Downloaded Type License Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching.pdf available 5.2 MB 2 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2019 2018 2.515 Q2 0.581 Q2
Number of the records: 1