Fabrication and Properties of Micromechanical Calorimeter with Piezoresistive Deflection Sensor and Resistive Microheater

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Title	Fabrication and Properties of Micromechanical Calorimeter with Piezoresistive Deflection Sensor and Resistive Microheater
Author	Gotszalk T.
Co-authors	Grabiec P.B.
	Hudek Peter 1953- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Shi F.
	Janus P.
	Barth W.
	Debski T.
	Zaborowski M.
	Rangelow I.W.

Source document	MNE'99 : Proceedings. - Roma, Italy, 1999
Language	eng - English
Country	IT - Italy
Document kind	rozpis článkov z periodík (rzb)
Category	AFC - Published papers from foreign scientific conferences
Year	1999

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Number of the records: 1