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Defects in high-K gate dielectric stacks

  1. TitleDefects in high-K gate dielectric stacks : nano-electronic semiconductor devices : proceedings of the NATO Advanced Research Workshop on defects in Advanced High-K Dielectric Nano-electronicc Semiconductor Devices, St. Petetburg, Russia, July 11-14, 2005
    Another authors Gusev E.P. (Editor)

    Issue dataDordrecht : Springer , 2006. - 492 s.
    EditionNATO Science Series. II. Mathematics, Physics and Chemistry : Vol. 220
    Languageeng - English
    CountryDE - Germany
    Document kindzborníky
    CategoryAAA - Scientific monographs published abroad
    Category of document (from 2022)V1 - Vedecký výstup publikačnej činnosti ako celok
    Type of documentmonografia
    Year2006
    References (1) Publication Activity of SAV - Articles
    book

    book


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