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Defects in high-K gate dielectric stacks
Title Defects in high-K gate dielectric stacks : nano-electronic semiconductor devices : proceedings of the NATO Advanced Research Workshop on defects in Advanced High-K Dielectric Nano-electronicc Semiconductor Devices, St. Petetburg, Russia, July 11-14, 2005 Another authors Gusev E.P. (Editor) Issue data Dordrecht : Springer , 2006. - 492 s. Edition NATO Science Series. II. Mathematics, Physics and Chemistry : Vol. 220 Language eng - English Country DE - Germany Document kind zborníky Category AAA - Scientific monographs published abroad Category of document (from 2022) V1 - Vedecký výstup publikačnej činnosti ako celok Type of document monografia Year 2006 References (1) Publication Activity of SAV - Articles book
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