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Stress investigation of the AlGaN/GaN micromachined circular diaphragms of a pressure sensor
Title Stress investigation of the AlGaN/GaN micromachined circular diaphragms of a pressure sensor Author Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Držík Milan Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Vallo Martin SAVELEK - Elektrotechnický ústav SAV Kutiš V. Haško D. Choleva P. Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document Journal of Micromechanics and Microengineering. Vol. 25, (2015), 015001 Language eng - English URL URL link Document kind rozpis článkov z periodík (rbx) Citations LEE, Siyoung - KIM, Junsoo - YUN, Inyeol - BAE, Geun Yeol - KIM, Daegun - PARK, Sangsik - YI, Il-Min - MOON, Wonkyu - CHUNG, Yoonyoung - CHO, Kilwon. An ultrathin conformable vibration-responsive electronic skin for quantitative vocal recognition. In NATURE COMMUNICATIONS. ISSN 2041-1723, 2019, vol. 10, no., pp. TAN, X. - LV, Y.J. - ZHOU, X.Y. - WANG, Y.G. - SONG, X.B. - YANG, X.L. - SHEN, B. - FENG, Z.H. - CAI, S.J. Direct-readout pressure sensor based on AlGaN/GaN heterostructure. In MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. ISSN 0946-7076, OCT 2020, vol. 26, no. 10, SI, p. 3189-3192. YANG, R. - DONG, A.R. - MENG, X.Z. - SHENG, Y.Q. - WANG, F. - XIA, C.L. - ALADEJANA, J.T. - FANG, Z. - ZHAO, R. - ZHAN, X.X. - LI, J.Z. Ultra-Thin Wood-Based Acoustic Diaphragms Fabricated via an Environmentally Friendly Strategy. In ACS APPLIED MATERIALS & INTERFACES. ISSN 1944-8244, OCT 19 2022, vol. 14, no. 41, p. 47089-47099. Dostupné na: https://doi.org/10.1021/acsami.2c13722. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2015 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1088/0960-1317/25/1/015001 
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File name Access Size Downloaded Type License Stress investigation of the AlGaN GaN micromachined circular diaphragms of a pressure sensor.pdf Neprístupný/archív 1.4 MB 0 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2015 2014 1.731 Q2 0.802 Q1
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