Nanostructuring of bulk Si and SiC substrates by femtosecond laser ablation for membrane fabrication and surgace functionalization

Number of the records: 1

Title	Nanostructuring of bulk Si and SiC substrates by femtosecond laser ablation for membrane fabrication and surgace functionalization
Author	Zehetner J.
Co-authors	Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ^ORCID
	Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV
	Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV

Source document	ASDAM 2016 : the 11th International Conference on Advanced Semiconductor Devices and Microsystems. P. 223-226. - : IEEE, 2016 / Haščík Štefan 1956 ; Dzuba Jaroslav 1987 ; Vanko Gabriel 1981
Language	eng - English
Document kind	rozpis článkov z periodík (rzb)
Category	ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2016
Registered in	WOS
Registered in	SCOPUS
DOI	10.1109/ASDAM.2016.7805935

article

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2016

Number of the records: 1