Structuring of titanium nitride films by dry reactive ion etching

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Title	Structuring of titanium nitride films by dry reactive ion etching
Author	Izsák Tibor SAVELEK - Elektrotechnický ústav SAV ^ORCID
Co-authors	Ščepka Tomáš 1985 SAVELEK - Elektrotechnický ústav SAV
	Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ^ORCID
	Fedor Ján 1976 SAVELEK - Elektrotechnický ústav SAV
	Romanyuk O.
	Hudec Boris SAVELEK - Elektrotechnický ústav SAV ^ORCID

Source document	Proceedings of ADEPT 2023 : 11th International Conference on Advances in Electronic and Photonic Technologies, held in Podbanské, High Tatras, Slovakia, June 12th – 15th, 2023. P. 150-153. - Žilina : University of Zilina in EDIS-Publishing Centre of UZ, 2023 / Jandura D. ; Lettrichová I. ; Kováč J., jr.
Language	eng - English
Country	SK - Slovak Republic
Document kind	rozpis článkov z periodík (rzb)
Category	AFD - Published papers from domestic scientific conferences
Category of document (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document	príspevok z podujatia
Year	2023

article

	File name	Access	Size	Downloaded	Type	License
	Structuring of titanium nitride films by dry reactive ion etching.pdf	available	428.4 KB	0	Publisher's version

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2023

Number of the records: 1