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Title Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications Author Rangelow I.W. Co-authors Ivanov T.Z. Ivanova K. Volland B. Grabiec P. Sarov Y. Persaud A. Gotszalk T. Zawierucha P. Zielony M. Dontzov D. Schmidt B Zier M. Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl W. Sulzbach T. Mielczarski J. Kolb S. du Latimier P. Pedreau R. Djakov V. Huq S.E. Edinger K. Fortagne O. Almansa A. Blom H.O. Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 84, iss. 5-8 (2007) p. 1260-1264 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2007 DOI 10.1016/j.mee.2007.01.219 
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