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Title Parallel proximal probe arrays with vertical interconnections Author Sarov Y. Co-authors Frank A. Ivanov Tzv. Zöllner J.-P. Ivanova K. Volland B. Rangelow I.W. Brogan A. Wilson R. Zawierucha P. Zielony M. Gotszalk T. Nikolov N. Zier M. Schmidt B Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Source document Journal of Vacuum Science and Technology B. Vol. 27, no. 6 (2009), p. 3132-3138, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2010 DOI 10.1116/1.3256662 Title Scanning proximal probes for parallel imaging and lithography Author Ivanova K. Co-authors Sarov Y. Ivanov T.Z. Frank A. Zöllner J. Bitterlich Ch. Wenzel U. Volland B. Klett S. Rangelow I.W. Zawierucha P. Zielony M. Gotszalk T. Dontzov D. Schott W. Nikolov N. Zier M. Schmidt B. Engl W. Sulzbach T. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Issue data American Vacuum Society Source document Journal of Vacuum Science Technology B. Vol. 26, No. 6 (2008) P. 2367-2373 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2008 DOI 10.1116/1.2990789 Title Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications Author Rangelow I.W. Co-authors Ivanov T.Z. Ivanova K. Volland B. Grabiec P. Sarov Y. Persaud A. Gotszalk T. Zawierucha P. Zielony M. Dontzov D. Schmidt B Zier M. Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl W. Sulzbach T. Mielczarski J. Kolb S. du Latimier P. Pedreau R. Djakov V. Huq S.E. Edinger K. Fortagne O. Almansa A. Blom H.O. Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 84, iss. 5-8 (2007) p. 1260-1264 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2007 DOI 10.1016/j.mee.2007.01.219 Title Application of self-actuated 32 cantilever array in atomic force surface measurements Author Gotszalk T. Co-authors Zawierucha P. Woszczyna M. Zielony M. Ivanov T.Z. Ivanova K. Volland B. Sarov Y. Persaud A. Dontzov D. Schmidt B Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl Heinz W. Sulzbach T. Mielczarski J. Kolb S. Pedreau R. Huq S.E. Edinger K. Fortagne O. Blom H.O. Rangelow I.W. Action International Conference on Micro & nano Engineering. MNE 2008 ( 34th : September 15-19, 2008 : Athens ) Source document 34th International Conference on Micro & nano Engineering : abstract book Category AFG - Abstracts of papers from foreign conferences Year 2008