Search results

Records found: 1  
Your query: Corporation name entry = "17th"
  1. TitleStudy of self-masking nanostructuring of boron doped diamond films by RF plasma etching
    Author Marton Marián
    Co-authors Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV
    Michniak P.
    Behúl Miroslav
    Řeháček V.
    Redhammer R.
    Vincze A.
    Papula Martin
    Vojs M.
    Corporation 17th Joint Vacuum Conference. JVC : Olomouc, Czech Republic : September 10-14, 2018
    Source document Vacuum. Vol. 170 (2019), art. no. 108954
    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2020
    DOI 10.1016/j.vacuum.2019.108954
    File nameAccessSizeDownloadedTypeLicense
    Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching.pdfavailable5.2 MB2Publisher's version
    article

    article



  This site uses cookies to make them easier to browse. Learn more about how we use cookies.