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Title Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching Author Marton Marián Co-authors Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV Michniak P. Behúl Miroslav Řeháček V. Redhammer R. Vincze A. Papula Martin Vojs M. Corporation 17th Joint Vacuum Conference. JVC : Olomouc, Czech Republic : September 10-14, 2018 Source document Vacuum. Vol. 170 (2019), art. no. 108954 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2020 DOI 10.1016/j.vacuum.2019.108954 File name Access Size Downloaded Type License Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching.pdf available 5.2 MB 2 Publisher's version 
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