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Title 2D and 3D growth of Ru/RuO2 metal layers with atomic vapour deposition Author Manke C. Co-authors Boissiere O. Weber U. Barbar G. Baumann P.K. Lindner J. Ťapajna Milan 1977 SAVELEK - Elektrotechnický ústav SAV Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Source document Microelectronic Engineering. Vol. 83, (2006), p. 2277. - Amsterdam : Elsevier Science Publishers Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2006 
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