Search results
Title Diamond-coated three-dimensional GaN micromembranes: Effect of nucleation and deposition techniques Author Izsák Tibor Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Babchenko Oleg 1983 SAVELEK - Elektrotechnický ústav SAV Potocký Štěpán Marton M. Vojs M. Choleva P. Kromka A. Source document Physica status solidi B. Basic solid state physics. Vol. 252, (2015), p. 2585-2590 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2015 DOI 10.1002/pssb.201552227 
article
Title Stress investigation of the AlGaN/GaN micromachined circular diaphragms of a pressure sensor Author Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Držík Milan Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Vallo Martin SAVELEK - Elektrotechnický ústav SAV Kutiš V. Haško D. Choleva P. Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document Journal of Micromechanics and Microengineering. Vol. 25, (2015), 015001 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2015 DOI 10.1088/0960-1317/25/1/015001 URL URL link File name Access Size Downloaded Type License Stress investigation of the AlGaN GaN micromachined circular diaphragms of a pressure sensor.pdf Neprístupný/archív 1.4 MB 0 Publisher's version article
Title LSMO thin films with high metal-insulator transition temperature on buffered SOI substrates for uncooled microbolometers Author Chromik Štefan 1949 SAVELEK - Elektrotechnický ústav SAV Co-authors Štrbík Vladimír 1954 SAVELEK - Elektrotechnický ústav SAV Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV Roch T. Rosová Alica 1962 SAVELEK - Elektrotechnický ústav SAV Španková Marianna 1969 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Lobotka Peter 1950 SAVELEK - Elektrotechnický ústav SAV Ralbovský M. Choleva P. Source document Applied Surface Science. Vol. 312, (2014), p. 30-33 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2014 DOI 10.1016/j.apsusc.2014.05.051 article
Title Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions Author Zehetner J. Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Choleva P. Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document / Breza Juraj ; Donoval Daniel ; Vavrinský E. ASDAM 2014 : The 10th International Conference on Advanced Semiconductor Devices and Microsystems. P. 259-262. - : IEEE, 2014 Category AFC - Published papers from foreign scientific conferences Year 2014 article
Title AlGaN/GaN micromembranes with diamond coating for high electron mobility transistors operated at high temperatures Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Co-authors Vojs M. Izsák Tibor Potocký Štěpán Choleva P. Marton M. Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document / Breza Juraj ; Donoval Daniel ; Vavrinský E. ASDAM 2014 : The 10th International Conference on Advanced Semiconductor Devices and Microsystems. P. 263-266. - : IEEE, 2014 Category AFC - Published papers from foreign scientific conferences Year 2014 article
Title Bulk micromachining of SiC substrate for MEMS sensor applications Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Co-authors Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Zehetner J. Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Choleva P. Kutiš V. Vallo Martin SAVELEK - Elektrotechnický ústav SAV Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document Microelectronic Engineering. Vol. 110, (2013), p. 260-264 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2013 DOI 10.1016/j.mee.2013.01.046 article
Title MEMS pressure sensor fabricated by advanced bulk micromachining techniques Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Co-authors Hudek Peter 1953- Zehetner J. Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Choleva P. Vallo Martin SAVELEK - Elektrotechnický ústav SAV Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document Proceedings of the SPIE. Vol. 8763, (2013), p. 8763-101 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2013 DOI 10.1117/12.2017499 article
Title Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device Author Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Co-authors Hudek Peter 1953- Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Kutiš V. Srnánek R. Choleva P. Vallo Martin SAVELEK - Elektrotechnický ústav SAV Držík Milan Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Source document Microelectronic Engineering : an international journal of semiconductor manufacturing technology. Vol. 98, (2012), p. 578-581 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2012 DOI 10.1016/j.mee.2012.06.014 article
Title Laser ablation: A supporting technique to micromachining of SiC Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Co-authors Zehetner J. Choleva P. Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document ASDAM 2012 : conference proceedings. P. 259-262. - Piscataway : IEEE, 2012 / Haščík Štefan 1956 ; Osvald Jozef 1953 ; International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2012 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2012 DOI 10.1109/ASDAM.2012.6418518 article
Title Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices Author Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Co-authors Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Choleva P. Vallo Martin SAVELEK - Elektrotechnický ústav SAV Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Držík Milan Source document MNE 2011 : 37th International Conference on Micro Nano Engineering. - Berlin, 2011 Category GII - Other publications and documents which is not possible to categorize into classes/categories mentioned above Year 2011 article