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Title Modeling approaches for electron beam lithography Author Koleva Elena Co-authors Vutova Katia Asparuhova Boriana Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Cvetkov K. Gerasimov V. Corporation EBT 2018. 13th International Conference on Electron Beam Technologies : Varna, Bulgaria : June 18-22, 2018 Source document Journal of Physics: Conference Series. Vol. 1089 (2018), art. no. 012016 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 DOI 10.1088/1742-6596/1089/1/012016 URL URL link File name Access Size Downloaded Type License Modeling approaches for electron beam lithography.pdf available 809.7 KB 0 Publisher's version 
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Title Simulation and experimental study on developed profiles in the positive polymer resist PMMA Author Koleva Elena Co-authors Vutova Katia Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Corporation EBT 2018. 13th International Conference on Electron Beam Technologies : Varna, Bulgaria : June 18-22, 2018 Source document Journal of Physics: Conference Series. Vol. 1089 (2018), art. no. 012015 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 DOI 10.1088/1742-6596/1089/1/012015 URL URL link File name Access Size Downloaded Type License Simulation and experimental study on developed profiles in the positive polymer resist PMMA.pdf available 682 KB 0 Publisher's version article