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Title Application of self-actuated 32 cantilever array in atomic force surface measurements Author Gotszalk T. Co-authors Zawierucha P. Woszczyna M. Zielony M. Ivanov T.Z. Ivanova K. Volland B. Sarov Y. Persaud A. Dontzov D. Schmidt B Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl Heinz W. Sulzbach T. Mielczarski J. Kolb S. Pedreau R. Huq S.E. Edinger K. Fortagne O. Blom H.O. Rangelow I.W. Action International Conference on Micro & nano Engineering. MNE 2008 ( 34th : September 15-19, 2008 : Athens ) Source document 34th International Conference on Micro & nano Engineering : abstract book Category AFG - Abstracts of papers from foreign conferences Year 2008