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Title Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission Author Barth W. Co-authors Debski T. Abedinov N. Ivanov T.Z. Heerlein H. Volland B. Gotszalk T. Rangelow I.W. Torkar K. Fritzenwallner K. Grabiec P. Studzinska K. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Microelectronic Engineering. Vol. 57-58 (2001), p. 825-831 Category ADC Year 2001 
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