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Title Micromachined atomic force microscopy sensor with integrated piezoresistive, sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes Author Pedrak R. Co-authors Ivanov T. Ivanova K. Gotszalk T. Abedinov N. Rangelow I.W. Edinger K. Tomerov E. Schenkel T. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Journal of Vacuum Science and Technology B. Vol. 21, no. 6 (2013), p. 3102-3107, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2003 DOI 10.1116/1.1614252 
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Title Parallel proximal probe arrays with vertical interconnections Author Sarov Y. Co-authors Frank A. Ivanov Tzv. Zöllner J.-P. Ivanova K. Volland B. Rangelow I.W. Brogan A. Wilson R. Zawierucha P. Zielony M. Gotszalk T. Nikolov N. Zier M. Schmidt B Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Source document Journal of Vacuum Science and Technology B. Vol. 27, no. 6 (2009), p. 3132-3138, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2010 DOI 10.1116/1.3256662 article
Title Scanning proximal probes for parallel imaging and lithography Author Ivanova K. Co-authors Sarov Y. Ivanov T.Z. Frank A. Zöllner J. Bitterlich Ch. Wenzel U. Volland B. Klett S. Rangelow I.W. Zawierucha P. Zielony M. Gotszalk T. Dontzov D. Schott W. Nikolov N. Zier M. Schmidt B. Engl W. Sulzbach T. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Issue data American Vacuum Society Source document Journal of Vacuum Science Technology B. Vol. 26, No. 6 (2008) P. 2367-2373 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2008 DOI 10.1116/1.2990789 article
Title Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications Author Rangelow I.W. Co-authors Ivanov T.Z. Ivanova K. Volland B. Grabiec P. Sarov Y. Persaud A. Gotszalk T. Zawierucha P. Zielony M. Dontzov D. Schmidt B Zier M. Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl W. Sulzbach T. Mielczarski J. Kolb S. du Latimier P. Pedreau R. Djakov V. Huq S.E. Edinger K. Fortagne O. Almansa A. Blom H.O. Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 84, iss. 5-8 (2007) p. 1260-1264 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2007 DOI 10.1016/j.mee.2007.01.219 article
Title Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission Author Barth W. Co-authors Debski T. Abedinov N. Ivanov T.Z. Heerlein H. Volland B. Gotszalk T. Rangelow I.W. Torkar K. Fritzenwallner K. Grabiec P. Studzinska K. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Microelectronic Engineering. Vol. 57-58 (2001), p. 825-831 Category ADC Year 2001 article
Title Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy Author Gotszalk T. Co-authors Radojewski J. Grabiec P.B. Dumania F. Shi P. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 16, iss. 6 (1998), p. 3948-3953, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1998 article
Title Fabrication of piezoresistive sensed AFM cantilever probe with integrated tip Author Rangelow I.W. Co-authors Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Gotszalk T. Grabiec P.B. Dumania P. Action Conference on Micromachining and Microfabrication Process Technology II : October 14-15, 1996 : Austin Source document Proceedings of the SPIE. Vol. 2879 (1996), p. 56-64 Category ADEA - Scientific papers in other foreign journals not registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1996 article
Title Application of self-actuated 32 cantilever array in atomic force surface measurements Author Gotszalk T. Co-authors Zawierucha P. Woszczyna M. Zielony M. Ivanov T.Z. Ivanova K. Volland B. Sarov Y. Persaud A. Dontzov D. Schmidt B Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl Heinz W. Sulzbach T. Mielczarski J. Kolb S. Pedreau R. Huq S.E. Edinger K. Fortagne O. Blom H.O. Rangelow I.W. Action International Conference on Micro & nano Engineering. MNE 2008 ( 34th : September 15-19, 2008 : Athens ) Source document 34th International Conference on Micro & nano Engineering : abstract book Category AFG - Abstracts of papers from foreign conferences Year 2008 article
Title Fabrication and Properties of Micromechanical Calorimeter with Piezoresistive Deflection Sensor and Resistive Microheater Author Gotszalk T. Co-authors Grabiec P.B. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Shi F. Janus P. Barth W. Debski T. Zaborowski M. Rangelow I.W. Action MNE'99. Micro and Nano Engineering International Conference : September 21-23, 1999 : Roma, Italy Source document MNE'99 : Proceedings. - Roma, Italy, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999 article