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Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Volland B. Barth W. Voigt J. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Action 12th International Vacuum Microelectronics Conference : July 1999 : Darmstadt, Germany Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 896-899 Category ADC Year 2000 DOI 10.1116/1.591293 
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Title Field emission cathode array with self aligned gate electrode fabricated by silicon micromachining Author Barth W. Co-authors Debski T. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Biehl S. Iwert P. Grabiec P.B. Studzinska K. Mitura S. Bekh I. Lushkin A. Il`chenko L. Il`chenko V. Haindl G. Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3544-3548 Category ADC Year 2000 DOI 10.1116/1.1324648 article
Title Fabrication of piezoresistive sensed AFM cantilever probe with integrated tip. Author Rangelow I.W. Co-authors Grabiec P.B. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Training in Microsystems - Manufacturing Processes for Micromechanical Components. P. XIV-9-XIV-20. - FSRM, Switzerland : Swiss Foundation for Research in Microtechnology, 1999 Category ABC - Chapters in scientific monographs published abroad Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document kapitola Year 1999 article
Title Chemically amplified deep UV resist for micromachining using electron beam lithography and dry etching Author Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Co-authors Rangelow I.W. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Stangl Guenther Grabiec P.B. Rangelow E.W. Belov Miroslav Shi F. Source document Sensors and Materials. Vol. 10, no. 4 (1998) p. 219-227 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1998 article
Title Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy Author Gotszalk T. Co-authors Radojewski J. Grabiec P.B. Dumania F. Shi P. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 16, iss. 6 (1998), p. 3948-3953, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1998 article
Title Fabrication of piezoresistive sensed AFM cantilever probe with integrated tip Author Rangelow I.W. Co-authors Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Gotszalk T. Grabiec P.B. Dumania P. Action Conference on Micromachining and Microfabrication Process Technology II : October 14-15, 1996 : Austin Source document Proceedings of the SPIE. Vol. 2879 (1996), p. 56-64 Category ADEA - Scientific papers in other foreign journals not registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1996 article
Title Fabrication and Properties of Micromechanical Calorimeter with Piezoresistive Deflection Sensor and Resistive Microheater Author Gotszalk T. Co-authors Grabiec P.B. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Shi F. Janus P. Barth W. Debski T. Zaborowski M. Rangelow I.W. Action MNE'99. Micro and Nano Engineering International Conference : September 21-23, 1999 : Roma, Italy Source document MNE'99 : Proceedings. - Roma, Italy, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999 article
Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Barth W. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Volland B. Voigt D. (Dieter) Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Action 12th International Vacuum Microelectronics Conference : July 1999 : Darmstadt, Germany Source document 12th International Vacuum Microelectronics Conference : Proceedings. - Darmstadt, Germany, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999 article