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Title Field emission cathode array with self aligned gate electrode fabricated by silicon micromachining Author Barth W. Co-authors Debski T. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Biehl S. Iwert P. Grabiec P.B. Studzinska K. Mitura S. Bekh I. Lushkin A. Il`chenko L. Il`chenko V. Haindl G. Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3544-3548 Category ADC Year 2000 DOI 10.1116/1.1324648 
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