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Title Micromachined atomic force microscopy sensor with integrated piezoresistive, sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes Author Pedrak R. Co-authors Ivanov T. Ivanova K. Gotszalk T. Abedinov N. Rangelow I.W. Edinger K. Tomerov E. Schenkel T. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Journal of Vacuum Science and Technology B. Vol. 21, no. 6 (2013), p. 3102-3107, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2003 DOI 10.1116/1.1614252 
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