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Title Fabrication and Properties of Micromechanical Calorimeter with Piezoresistive Deflection Sensor and Resistive Microheater Author Gotszalk T. Co-authors Grabiec P.B. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Shi F. Janus P. Barth W. Debski T. Zaborowski M. Rangelow I.W. Action MNE'99. Micro and Nano Engineering International Conference : September 21-23, 1999 : Roma, Italy Source document MNE'99 : Proceedings. - Roma, Italy, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999 
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