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Records found: 39  
Your query: Author Sysno = "^sav_un_auth 0001133^"
  1. TitleStudy of lithographic parameters for the trilayer resist systems in electron beam lithography
    Author Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Co-authors Vutova Katia
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Source document AIP Conference Proceedings. Vol. 2778 (2023), art. no. 030001
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2023
    DOI 10.1063/5.0136258
    article

    article

  2. TitleOptimisation criteria for the process electron beam lithography of negative AR-N7520 resists
    Author Koleva Elena
    Co-authors Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Vutova Katia
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Source document Journal of Physics: Conference Series. Vol. 2443, no. 1 (2023), art. no. 012007
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2023
    DOI 10.1088/1742-6596/2443/1/012007
    article

    article

  3. TitleOptimization of electron beam lithography processing of resist AR-N 7520
    Author Koleva Elena
    Co-authors Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Koleva Lilyana
    Vutova Katia
    Markova Irina
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Action VI International scientific conference INDUSTRY 4.0. Winter session : 8-11 December 2021 : Borovets, Bulgaria
    Source document Industry 4.0. Vol. 6, no. 5 (2021), p. 189-191
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok z podujatia
    Year2022
    article

    article

  4. TitleStudy on electron beam irradiation sensitive polymers
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    ActionInternational Conference of Condensed Matter (APCOM 2017) : June 12-14, 2017 : Štrbské Pleso, Slovak Republic
    Source document APCOM 2017 : Proceedings of the 23th International Conference on Applied Physics of Condensed Matter, June 12-14, 2017, Štrbské Pleso, Slovak Republic. P. 194-198. - Bratislava : SPEKTRUM STU, 2017 / Vajda J. ; Jamnický I.
    CategoryAFD - Published papers from domestic scientific conferences
    Year2017
    article

    article

  5. TitleResist characteristics simulation of HSQ electron beam resist
    Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Co-authors Vutova Katia
    Koleva Elena
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Mladenov Georgy
    Source document Electrotechnica & electronica E+E. Vol. 51, no. 5-6 (2016), p. 246-250
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2016
    article

    article

  6. TitleStudy on polymers with implementation in electron beam lithography
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Vutova Katia
    Koleva Elena
    Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Mladenov Georgy
    Source document Polymer Science : Research advances, practical applications and educational aspects. No. 1, p. 488-497. - Spain : Formatex Research Center, 2016
    CategoryBEE - Professional papers in foreign proceedings (conference/non-conference; peer-reviewed/non-peer-reviewed)
    Category of document (from 2022)O2 - Odborný výstup publikačnej činnosti ako časť knižnej publikácie alebo zborníka
    Type of documentpríspevok
    Year2016
    article

    article

  7. TitlePatterning of structures by e-beam lithography and ion etching for gas sensor applications
    Author Ďurina P.
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Vutova Katia
    Koleva Elena
    Mladenov Georgy
    Kuš P.
    Pleceník A.
    Source document Journal of Physics: Conference Series. Vol. 514 (2014), art. no. 012037
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2014
    DOI 10.1088/1742-6596/514/1/012037
    article

    article

  8. TitleStudy of electron beam resists: negative tone HSQ and positive tone SML300
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Koleva Elena
    Vutova Katia
    Mladenov Georgy
    ActionInternational Conference on Electron Beam Technologies ( 11th : June 8-12, 2014 : Varna )
    Source document Elektrotechnika i elektronika E+E : Eleventh International Conference on Electron Beam Technologies. Vol. 49 (2014) no. 5-6
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2014
    article

    article

  9. TitleInvestigation of e-beam resists for structure patterning in the nanophotonic device fabrication
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Glezos N.
    Haščík Štefan 1956 SAVELEK - Elektrotechnický ústav SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Škriniarová Jaroslava
    Source document / Pudiš D. ; Šušlík Ľ. ; Kováč J., jr. ; Flickyngerová S. ; Lettrichová I. Proceedings of ADEPT : 2nd International Conference on Advances in Electronic and Photonic Technologies. P. 241-246. - Žilina : University of Žilina, 2014 ; International Conference on Advances in Electronic and Photonic Technologies ADEPT 2014
    CategoryAFD - Published papers from domestic scientific conferences
    Year2014
    article

    article

  10. TitleLimits to nanopatterning based on e-beam lithography
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Glezos N.
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975-
    Písečný Pavol
    Velessiotis Dimitrios
    Source document Proceedings of the 20th International Conference on Applied Physics of Condensed Matter : APCOM 2014. P. 292-295. - Bratislava : FEI STU, 2014 / Vajda J. ; Jamnický I. ; International Conference on Applied Physics of Condensed Matter APCOM 2014
    CategoryAFDA - Published papers from international scientific conferences in Slovakia
    Year2014
    article

    article


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