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Title Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma Author Marton Marián Co-authors Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV Řeháček V. Michniak P. Behúl Miroslav Novák Patrik Vančo L. Vojs M. Source document Journal of Micromechanics and Microengineering. Vol. 29, no. 12 (2019), art. no. 124004, 9 p. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2020 DOI 10.1088/1361-6439/ab4d6f File name Access Size Downloaded Type License Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma.pdf available 3 MB 0 Publisher's version 
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Title Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching Author Marton Marián Co-authors Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV Michniak P. Behúl Miroslav Řeháček V. Redhammer R. Vincze A. Papula Martin Vojs M. Corporation 17th Joint Vacuum Conference. JVC : Olomouc, Czech Republic : September 10-14, 2018 Source document Vacuum. Vol. 170 (2019), art. no. 108954 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2020 DOI 10.1016/j.vacuum.2019.108954 File name Access Size Downloaded Type License Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching.pdf available 5.2 MB 2 Publisher's version article
Title Effect of mask material on the side walls angle of boron doped diamond patterns etched in various types of plasma Author Marton Marián Co-authors Ritomský Mário 1993- Řeháček V. Michniak P. Behúl Miroslav Redhammer R. Vojs M. Action MME 2018. 29th Micromechanics and Microsystems Europe Workshop : 26-29 August 2018 : Smolenice, Slovakia Source document MME 2018 : 29th Micromechanics and Microsystems Europe Workshop : Booklet with full papers. P. 150-155. - Bratislava : Slovak University of Technology, Bratislava, 2018 / Hotový I. ; Mikolášek M. ; Predanocy Martin 1984- ; MME 2018 29th Micromechanics and Microsystems Europe Workshop Category AFD - Published papers from domestic scientific conferences Year 2018 article
Title Analysis of carbon nanowals prepared by hot filament chemical vapour deposition Author Michniak P. Co-authors Marton M. Behú M. Redhammer R. Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Source document NANOCON 2015 : 7th International Conference on Nanomaterials - Research and Application; Brno October 2015. P. 143-148. - : TANGER Ltd., 2015 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2016 article
Title Development of diamond thin films on various substrates Author Vincze A. Co-authors Michniak P. Varga M. Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV Uherek F. Source document / Pudiš D. ; Kubicova I. ; Bury P. APCOM 2011 : proceedings of the 17th International Conference on Applied Physics of Condensed Matter, held in SPA Nový Smokovec, High Tatras, Slovakia, June 22-24, 2011. P. 82-85. - Žilina : University of Žilina, 2011 Category AED - Scientific papers in domestic peer-reviewed proceedings, monographs Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok Year 2011 article