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Title Experimental and theoretical study on chemically semi-amplified resist AR-P 6200 Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Vutova Katia Andok Robert 1973- SAVINFO - Ústav informatiky SAV Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Tanaka Takeshi Corporation VEIT 2017. 20th International Summer School on Vacuum, Electron and Ion Technologies : Black Sea Resort Sozopol, Bulgaria : September 25-29, 2017 Source document Journal of Physics: Conference Series. Vol. 992 (2018), art. no. 012057 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 DOI 10.1088/1742-6596/992/1/012057 URL URL link File name Access Size Downloaded Type License Experimental and theoretical study on chemically semi-amplified resist AR-P 6200.pdf available 1.2 MB 0 Publisher's version 
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Title Limitations of variable shaped electron beam lithography for advanced research and semiconductor applications Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Vutova Katia Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Andok Robert 1973- SAVINFO - Ústav informatiky SAV Action International spring seminar on electronics technology. ISSE 2017 ( 40 : May 10-14, 2017 : Sofia, Bulgaria ) Source document Proceedings of the International Spring Seminar on Electronics Technology. (2017), art. no. 8000969. - : IEEE Computer Society Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2017 DOI 10.1109/ISSE.2017.8000969 article
Title Study on electron beam irradiation sensitive polymers Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Action International Conference of Condensed Matter (APCOM 2017) : June 12-14, 2017 : Štrbské Pleso, Slovak Republic Source document APCOM 2017 : Proceedings of the 23th International Conference on Applied Physics of Condensed Matter, June 12-14, 2017, Štrbské Pleso, Slovak Republic. P. 194-198. - Bratislava : SPEKTRUM STU, 2017 / Vajda J. ; Jamnický I. Category AFD - Published papers from domestic scientific conferences Year 2017 article
Title Resist characteristics simulation of HSQ electron beam resist Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Co-authors Vutova Katia Koleva Elena Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Mladenov Georgy Source document Electrotechnica & electronica E+E. Vol. 51, no. 5-6 (2016), p. 246-250 Category ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2016 article
Title Study of negative electron beam nanoresist HSQ on GaAs substrate Author Andok Robert 1973- SAVINFO - Ústav informatiky SAV Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Škriniarová Jaroslava Vutova Katia Source document ASDAM 2016 : the 11th International Conference on Advanced Semiconductor Devices and Microsystems. P. 133-136. - : IEEE, 2016 / Haščík Štefan 1956 ; Dzuba Jaroslav 1987 ; Vanko Gabriel 1981 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2017 DOI 10.1109/ASDAM.2016.7805913 article
Title Study of electron beam resists: negative tone HSQ and positive tone SML300 Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Koleva Elena Vutova Katia Mladenov Georgy Action International Conference on Electron Beam Technologies ( 11th : June 8-12, 2014 : Varna ) Source document Elektrotechnika i elektronika E+E : Eleventh International Conference on Electron Beam Technologies. Vol. 49 (2014) no. 5-6 Category ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2014 article
Title Investigation of e-beam resists for structure patterning in the nanophotonic device fabrication Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Andok Robert 1973- SAVINFO - Ústav informatiky SAV Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Glezos N. Haščík Štefan 1956 SAVELEK - Elektrotechnický ústav SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Škriniarová Jaroslava Source document / Pudiš D. ; Šušlík Ľ. ; Kováč J., jr. ; Flickyngerová S. ; Lettrichová I. Proceedings of ADEPT : 2nd International Conference on Advances in Electronic and Photonic Technologies. P. 241-246. - Žilina : University of Žilina, 2014 ; International Conference on Advances in Electronic and Photonic Technologies ADEPT 2014 Category AFD - Published papers from domestic scientific conferences Year 2014 article
Title Application of direct write variable shape e-beam lithography Author Jablonská Viera 1965- SAVINFO - Ústav informatiky SAV Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Čaplovič Igor 1948 SAVINFO - Ústav informatiky SAV Andok Robert 1973- SAVINFO - Ústav informatiky SAV Hrkút Pavol 1948- SAVINFO - Ústav informatiky SAV Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Source document / Bardošová Mária 13th European Conference on Organised Films : ECOF 13. P. P35. - Cork : Tyndall National Institute UCC, 2013 ; European Conference on Organised Films ECOF 13 Category BFA - Abstracts of scientific papers from foreign (conferences) Year 2013 article
Title Snímače polohy na použitie pri vyššej prevádzkovej teplote a vyššom prevádzkovom tlaku Title translation Position sensors for use at a higher operating temperature and higher operating pressure Author Andok Robert 1973- SAVINFO - Ústav informatiky SAV Co-authors Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Source document ATP Journal. No. 4 (2013) p. 20-21. - Bratislava : STU Category ADFB - Scientific papers in other domestic journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2013 article
Title Investigation of the high sensitive negative resist for the photomasks fabrication by e-beam lithography Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Co-authors Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Source document Elektrotechnica & elektronica E+E. Vol. 47 (2012) no. 5-6, p. 5-9 Category ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2012 article