Search results

Records found: 23  
Your query: Author Sysno = "^sav_un_auth 0018472^"
  1. TitleExperimental and theoretical study on chemically semi-amplified resist AR-P 6200
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Vutova Katia
    Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Tanaka Takeshi
    Corporation VEIT 2017. 20th International Summer School on Vacuum, Electron and Ion Technologies : Black Sea Resort Sozopol, Bulgaria : September 25-29, 2017
    Source document Journal of Physics: Conference Series. Vol. 992 (2018), art. no. 012057
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2018
    DOI 10.1088/1742-6596/992/1/012057
    URLURL link
    File nameAccessSizeDownloadedTypeLicense
    Experimental and theoretical study on chemically semi-amplified resist AR-P 6200.pdfavailable1.2 MB0Publisher's version
    article

    article

  2. TitleLimitations of variable shaped electron beam lithography for advanced research and semiconductor applications
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Vutova Katia
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    ActionInternational spring seminar on electronics technology. ISSE 2017 ( 40 : May 10-14, 2017 : Sofia, Bulgaria )
    Source document Proceedings of the International Spring Seminar on Electronics Technology. (2017), art. no. 8000969. - : IEEE Computer Society
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2017
    DOI 10.1109/ISSE.2017.8000969
    article

    article

  3. TitleStudy on electron beam irradiation sensitive polymers
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    ActionInternational Conference of Condensed Matter (APCOM 2017) : June 12-14, 2017 : Štrbské Pleso, Slovak Republic
    Source document APCOM 2017 : Proceedings of the 23th International Conference on Applied Physics of Condensed Matter, June 12-14, 2017, Štrbské Pleso, Slovak Republic. P. 194-198. - Bratislava : SPEKTRUM STU, 2017 / Vajda J. ; Jamnický I.
    CategoryAFD - Published papers from domestic scientific conferences
    Year2017
    article

    article

  4. TitleResist characteristics simulation of HSQ electron beam resist
    Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Co-authors Vutova Katia
    Koleva Elena
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Mladenov Georgy
    Source document Electrotechnica & electronica E+E. Vol. 51, no. 5-6 (2016), p. 246-250
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2016
    article

    article

  5. TitleStudy of negative electron beam nanoresist HSQ on GaAs substrate
    Author Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Škriniarová Jaroslava
    Vutova Katia
    Source document ASDAM 2016 : the 11th International Conference on Advanced Semiconductor Devices and Microsystems. P. 133-136. - : IEEE, 2016 / Haščík Štefan 1956 ; Dzuba Jaroslav 1987 ; Vanko Gabriel 1981
    CategoryADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2017
    DOI 10.1109/ASDAM.2016.7805913
    article

    article

  6. TitleStudy of electron beam resists: negative tone HSQ and positive tone SML300
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Koleva Elena
    Vutova Katia
    Mladenov Georgy
    ActionInternational Conference on Electron Beam Technologies ( 11th : June 8-12, 2014 : Varna )
    Source document Elektrotechnika i elektronika E+E : Eleventh International Conference on Electron Beam Technologies. Vol. 49 (2014) no. 5-6
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2014
    article

    article

  7. TitleInvestigation of e-beam resists for structure patterning in the nanophotonic device fabrication
    Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Co-authors Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Glezos N.
    Haščík Štefan 1956 SAVELEK - Elektrotechnický ústav SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Škriniarová Jaroslava
    Source document / Pudiš D. ; Šušlík Ľ. ; Kováč J., jr. ; Flickyngerová S. ; Lettrichová I. Proceedings of ADEPT : 2nd International Conference on Advances in Electronic and Photonic Technologies. P. 241-246. - Žilina : University of Žilina, 2014 ; International Conference on Advances in Electronic and Photonic Technologies ADEPT 2014
    CategoryAFD - Published papers from domestic scientific conferences
    Year2014
    article

    article

  8. TitleApplication of direct write variable shape e-beam lithography
    Author Jablonská Viera 1965- SAVINFO - Ústav informatiky SAV
    Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Čaplovič Igor 1948 SAVINFO - Ústav informatiky SAV
    Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Hrkút Pavol 1948- SAVINFO - Ústav informatiky SAV
    Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Source document / Bardošová Mária 13th European Conference on Organised Films : ECOF 13. P. P35. - Cork : Tyndall National Institute UCC, 2013 ; European Conference on Organised Films ECOF 13
    CategoryBFA - Abstracts of scientific papers from foreign (conferences)
    Year2013
    article

    article

  9. TitleSnímače polohy na použitie pri vyššej prevádzkovej teplote a vyššom prevádzkovom tlaku
    Title translationPosition sensors for use at a higher operating temperature and higher operating pressure
    Author Andok Robert 1973- SAVINFO - Ústav informatiky SAV
    Co-authors Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Source document ATP Journal. No. 4 (2013) p. 20-21. - Bratislava : STU
    CategoryADFB - Scientific papers in other domestic journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2013
    article

    article

  10. TitleInvestigation of the high sensitive negative resist for the photomasks fabrication by e-beam lithography
    Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV
    Co-authors Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV
    Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV
    Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV
    Source document Elektrotechnica & elektronica E+E. Vol. 47 (2012) no. 5-6, p. 5-9
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2012
    article

    article


  This site uses cookies to make them easier to browse. Learn more about how we use cookies.