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Title Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy Author Gotszalk T. Co-authors Radojewski J. Grabiec P.B. Dumania F. Shi P. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 16, iss. 6 (1998), p. 3948-3953, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1998 
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