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Title Optimization of e-beam nanostructure patterning for TiO2 gas sensors fabrication Author Ďurina P. Co-authors Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Vutova Katia Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Koleva Elena Mladenov Georgy Kúš P. Plecenik Andrej Source document Eighteenth international summer school on vacuum, electron and ion technologies : VEIT 2013. PB-16. - Sozopol : Institute of Electronics, Bulgarian Academy of Sciences, 2013 ; VEIT 2013 Category BFA - Abstracts of scientific papers from foreign (conferences) Year 2014 
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